正交实验法优选电沉积Co-Pt-W磁性薄膜制备工艺

功能材料, 2006, 37(11): 1716-1722.

正交实验法优选电沉积Co-Pt-W磁性薄膜制备工艺

吴琼 ^1, , 卫国英 ^2, , 葛洪良 ^3, , 王新燕 ^4, , 周巧英 ^5,

1.中国计量学院理学院,浙江,杭州,310018

2.中国计量学院理学院,浙江,杭州,310018

3.中国计量学院理学院,浙江,杭州,310018

4.中国计量学院理学院,浙江,杭州,310018

5.中国计量学院理学院,浙江,杭州,310018

基金项目: 国家自然科学基金(20571067)

关键词：正交实验设计 , 电沉积薄膜 , 硬磁性

Optimization of process for preparing Co-Pt-W magnetic films electrodeposited by orthogonal experiments

利用正交设计L25(56)安排实验,分别以矫顽力和磁滞回线的方形度为考察指标,通过极差分析和方差分析优化Co-Pt-W磁性薄膜电沉积制备工艺,结合工业生产的实际需求,得到Na2WO4·2H2O及(NH4)2C6H6O7浓度分别为0.08L、0.198mol/L,电流密度为5mA/cm2,温度为60℃的制备条件为最佳组合.在此条件下制备了Co-Pt-W薄膜样品,并对其磁性能进行验证,对结构和形貌进行了测量.结果表明hcp结构有利于电沉积Co-Pt-W薄膜的硬磁性能.

参考文献

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正交实验法优选电沉积Co-Pt-W磁性薄膜制备工艺

Optimization of process for preparing Co-Pt-W magnetic films electrodeposited by orthogonal experiments

参考文献