ENERGY-LOSS FUNCTIONS DERIVED FROM REELS SPECTRA FOR ALUMINUM

金属学报(英文版), 2005, 18(3): 217-222.

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1.Structure Research Laboratory and Department of Physics, University of Science and Technology of China,The Chinese Academy of Sciences, Hefei 230026, China

2.Structure Research Laboratory and Department of Physics, University of Science and Technology of China,The Chinese Academy of Sciences, Hefei 230026, China

3.Structure Research Laboratory and Department of Physics, University of Science and Technology of China,The Chinese Academy of Sciences, Hefei 230026, China

4.Structure Research Laboratory and Department of Physics, University of Science and Technology of China,The Chinese Academy of Sciences, Hefei 230026, China

5.Structure Research Laboratory and Department of Physics, University of Science and Technology of China,The Chinese Academy of Sciences, Hefei 230026, China

6.Department of Information Science, Osaka Institute of Technology, Osaka 573-0196, Japan

7.Ftmdamental Electronics Research Institute, Osaka Electro-Communication University, Osaka 572-8530, Japan

8.Department of Systems Engineering, Nagoya Institute of Technology, Nagoya 466-8555, Japan

基金项目: 国家自然科学基金(10025420,20075026,60306006,90206009) 日本创新科研项目(13GS0022)

ENERGY-LOSS FUNCTIONS DERIVED FROM REELS SPECTRA FOR ALUMINUM

Keywords： effective energy loss function

The effective energy loss functions for Al have been derived from differential inverse inelastic mean free path based on the extended Landau approach. It has been revealed that the effective energy loss function is very close in value to the theoretical surface energy loss function in the lower energy loss region but gradually approaches the theoretical bulk energy loss function in the higher energy loss region. Moreover, the intensity corresponding to surface excitation in effective energy loss functions decreases with the increase of primary electron energy. These facts show that the present effective energy loss function describes not only surface excitation but also bulk excitation. At last, REELS spectra simulated by Monte Carlo method based on use of the effective energy loss functions has reproduced the experimental REELS spectra with considerable success.

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ENERGY-LOSS FUNCTIONS DERIVED FROM REELS SPECTRA FOR ALUMINUM

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