硅基材料由于具有高理论比容量、低嵌锂电位而有望替代锂离子电池石墨类负极材料,但是首次不可逆容量大、循环寿命差是阻止其商业化的主要问题.薄膜化是提高硅基材料循环寿命的一种有效手段.本文讨论了硅基薄膜在脱嵌锂过程中的结构变化及容量衰减原因,综述了磁控溅射法制备硅基薄膜的研究进展,并对硅基薄膜用于锂离子电池负极材料的研究前景进行展望.
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