采用阴极弧离子镀法在H13钢表面制备TiAlSiN涂层,通过SEM对TiAlSiN涂层表面和界面形貌进行了观察,通过EDS和XRD对其化学元素和物相进行了分析,利用划痕法测定了其结合强度,并对其界面结合机理进行了探讨.结果表明:TiAlSiN涂层表面主要成分为Ti、Al、Si和N元素,各元素分布均匀,未产生富集现象;高硬度的TiAlN是由Al原子以置换方式取代TiN中部分Ti原子生成的,且TiN和AlN晶粒得到细化,形成较为致密的结构,使涂层硬度得到了提高;Ti、Al、Si、N等原子在结合界面处发生相互扩散,是形成冶金结合的主要机制;TiAlSN涂层/H13钢体系具有较好的结合强度,用划痕法测得涂层界面结合强度为44 N.
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