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耦合求解了多晶硅定向凝固炉内热传导、热辐射、熔体和氩气热对流等各种耦合换热,比较分析了不同氩气流量下定向凝固炉内部热场分布和硅熔体流动结构。结果表明,当氩气流量增大到一定值时,氩气流对凝固过程中硅熔体流动和热输运的影响显著增强。

Thermal conduction, thermal radiation, silicon melt and argon gas convection in a casting furnace for multi-crystalline silicon ingot were solved in a coupled way. The effects of argon flow rate on the global thermal field and the silicon melt flow were investigated. The results showed that the argon flow could significantly influence the melt convection and heat transport in a casting process when the argon gas flow rate exceeds a critical value.

参考文献

[1] Machida N.;Abe K.;Ono N.;Kida M.;Shimizu Y.;Suzuki Y. .The effects of argon gas flow rate and furnace pressure on oxygen concentration in Czochralski-grown silicon crystals[J].Journal of Crystal Growth,1998(3):362-368.
[2] REN Bingyan,ZHAO Long,ZHAO Xiuling,WANG Huixian,CAO Zhongqian,ZHU Huimin,FU Hongbo.Effects of argon gas flow rate and guide shell on oxygen concentration in Czochralski silicon growth[J].稀有金属(英文版),2006(01):7-10.
[3] V.V. Kalaev;I.Yu. Evstratov;Yu.N. Makarov .Gas flow effect on global heat transport and melt convection in Czochralski silicon growth[J].Journal of Crystal Growth,2003(1/2):87-99.
[4] B. Gao;S. Nakano;K. Kakimoto .Global Simulation of Coupled Carbon and Oxygen Transport in a Unidirectional Solidification Furnace for Solar Cells[J].Journal of the Electrochemical Society,2010(2):H153-H159.
[5] Roland Becker;Malte Braack .Solution of a stationary benchmark problem for natural convection with large temperature difference[J].International Journal of Thermal Sciences,2002(5):428-439.
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