金刚石薄膜用钢基表面过渡层研究进展

材料导报, 2006, 20(9): 86-97.

金刚石薄膜用钢基表面过渡层研究进展

张艳梅 ^1, , 潘俊德 ^2, , 李忠厚 ^3, , 徐重 ^4,

1.太原理工大学表面工程研究所,太原,030024;太原理工大学材料科学与工程学院,太原,030024

2.太原理工大学表面工程研究所,太原,030024

3.太原理工大学表面工程研究所,太原,030024

4.太原理工大学表面工程研究所,太原,030024

基金项目: 太原理工大学校科研和教改项目(190-100003) 山西省自然科学基金(20021054)

关键词：金刚石薄膜 , 钢基 , 过渡层 , 粘结强度

Advances in the Research of Intermediate Layers of Steel Substrates for Diamond Films

介绍了影响钢基表面金刚石薄膜沉积的不利因素,分析和综述了近10年来在提高金刚石薄膜质量以及薄膜粘结性等方面所采用的各种中间过渡层及其研究进展.过渡层可采用沉积法制备,也可采用表面改性法制备.过渡层可以制备成单层膜结构,也可制备成多层膜结构.对于不同的基底材料应选择不同的过渡层.

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金刚石薄膜用钢基表面过渡层研究进展

Advances in the Research of Intermediate Layers of Steel Substrates for Diamond Films

参考文献