以尖晶石结构ZnFe_2O_4材料为研究对象,以可溶性无机盐为原料,利用溶胶-凝胶技术在Al_2O_3基片上制备了ZnFe_2O_4薄膜,研究其对低浓度丙酮气体的敏感特性.通过DTA,TG,XRD及SEM分析手段对制膜过程及薄膜形态进行了表征.研究发现,采用柠檬酸作为络合剂的无机盐原料溶液-溶胶-凝胶(ISG)工艺,在700℃烧结温度下,可以得到覆盖良好、结构均匀、晶粒尺寸约在100 nm的尖晶石结构ZnFe_2O_4薄膜.通过该薄膜对丙酮气敏特性测试表明,ZnFe_2O_4材料对丙酮具有较好的敏感性,在550℃的操作温度下,材料对丙酮气体敏灵敏度为8,响应与恢复时间小于5 s.
In order to investigate the characteristics of oxide semiconductor materials to low concentration ace-tone gas, the spinel type ZnFe_2O_4 thin films were successfully prepared on Al_2O_3 substrate by sol-gel method using soluble inorganic salts as row materials. The synthesis process and the modality of thin films were char-acterized by DTA, TG, XRD and SEM. Using citric acid as chelating agent, sintered at 700 ℃, a compact and well-coated ZnFe_2O_4 thin film with crystal size of 100 nm would be obtained by inorganic sol-gel (ISG) method. The acetone-sensitive test shows that ZnFe_2O_4 thin films have a good sensitive characteristic to ace-tone, and the sensitivity is 8 at 550 ℃. Both the response time and the recover time are less than 5 s.
参考文献
| [1] | R. Bene;Z. Pinter;I. V. Perczel;M. Fleischer;F. Reti .High-temperature semiconductor gas sensors[J].Vacuum,2001(2/4):275-278. |
| [2] | Raible I;Burghard M;Schlecht U;Yasuda A;Vossmeyer T .V2O5 nanofibres: novel gas sensors with extremely high sensitivity and selectivity to amines[J].Sensors and Actuators, B. Chemical,2005(2):730-735. |
| [3] | Chen NS.;Liu ES.;Huang JL.;Yang XJ. .Reducing gas-sensing properties of ferrite compounds MFe2O4 (M = Cu, Zn, Cd and Mg)[J].Sensors and Actuators, B. Chemical,2000(1/3):178-180. |
| [4] | 张元广,陈友存,周根陶.ZnFe2O4纳米微晶的自控合成及其气敏性[J].应用化学,2003(04):332-335. |
| [5] | 张彬,季惠明,初振华,张周,徐廷献.电导型CuO-BaTiO3基薄膜的制备与CO2气敏特性的研究[J].硅酸盐学报,2004(04):490-493. |
| [6] | 季惠明,李翠霞,徐廷献.锶铋钽铁电薄膜的溶胶-凝胶法制备过程与机制研究[J].天津大学学报,2003(06):693-696. |
| [7] | 张学骜,吴文健,满亚辉,刘长利.溶胶-凝胶法制备ITO薄膜研究进展[J].材料科学与工艺,2007(02):264-268. |
| [8] | Xiaochuan Liu;Huiming Ji;Yanfei Gu;Mingxia Xu .Preparation and acetone sensitive characteristics of nano-LaFeO_3 semiconductor thin films by polymerization complex method[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,2006(1/3):98-101. |
| [9] | 田敬民,李守智.金属氧化物半导体气敏机理探析[J].西安理工大学学报,2002(02):144-147. |
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%