基于应变协调理论模型推导出薄膜弹性模量和泊松比表达式,对普通拉伸试验法进行了改进,即采用分区不同膜厚拉伸法分别研究了氧化铝薄膜/铝合金基体系统和氮化钛薄膜/高速钢基体系统上不同厚度薄膜的弹性模量和泊松比.结果表明:该方法可有效地减少薄膜制备、拉伸试验中偶然因素以及基体材料等对所测薄膜弹性性能的影响.通过不同厚度薄膜弹性模量的对比,可知2种体系薄膜的弹性模量随膜厚的增加而提高.分析认为薄膜内应力的状态、大小以及在薄膜厚度方向的重新分配等因素对薄膜弹性模量有很大影响.
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