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运用分子动力学(MD)的研究方法,经过分子聚合、能量最优化和退火模拟等构建了不同长细比的SU-8光刻胶模型,模拟研究了在室温条件下不同长细比的SU-8胶纳米尺寸模型的弹性模量、泊松比、剪切模量等力学性能参数.结果表明,在室温下,随着SU-8胶模型长细比的增加,材料的扬氏模量和剪切模量逐渐增大,这一现象与微尺度SU-8胶模型的实验结果一致,表明有效长细比是微尺度下表征材料力学性能和尺寸效应的一个重要参数.

参考文献

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[2] 杜立群,郭照沛,张晓蕾.SU-8光刻胶与Ni基底结合性的分子模拟[J].高分子材料科学与工程,2010(03):168-171.
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[4] Tay FEH.;Watt F.;Choong WO.;van Kan JA. .A novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels[J].Journal of Micromechanics and Microengineering,2001(1):27-32.
[5] Khoo HS.;Liu KK.;Tseng FG. .Mechanical strength and interfacial failure analysis of cantilevered SU-8 microposts[J].Journal of Micromechanics and Microengineering,2003(6):822-831.
[6] Yu H;Balogun U;Li B;Murray TW;Zhang X .Building embedded microchannels using a single layered SU-8, and determining Young's modulus using a laser acoustic technique[J].Journal of Micromechanics and Microengineering,2004(11):1576-1584.
[7] Hwang SF;Horn JT;Wang HJ .Strain measurement of SU-8 photoresist by a digital image correlation method with a hybrid genetic algorithm[J].Optics and Lasers in Engineering,2008(3):281-289.
[8] Jinkui Chu;Jiali Gao .Mechanical characterization of SU-8 thin films through varying effective aspect ratios for microelectromechanical systems application[J].Journal of micro/nanolithography, MEMS, and MOEMS,2012(2):023006-1-023006-10.
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