Microstructural characteristics in the BaSrNb0.3Ti0.7O3 thin film, grown on SrTiO3 substrate by computercontrolled laser molecular beam epitaxy, were characterized by means of transmission electron microscopy (TEM). It is found that the film is single-crystallized and epitaxially grown on the SrTiO3 substrate forming a flat and distinct interface. Anti-phase domains were identified, and the crystallographic features of mismatch dislocations at the interface between film and substrate were clarified. The high conductivity of the present film was discussed from the viewpoint of Nb dopant and the nitrogen atmosphere.
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