综述了掺铝氧化锌(ZAO)透明导电薄膜的国内外研究进展,光学性能与电学特性,各种制备方法及应用前景.重点介绍了溶胶-凝胶法制备ZAO薄膜的热处理条件、溶胶浓度、陈化时间、加水量以及稳定剂种类和用量等方面对薄膜结构和性能的影响,并提出了ZA0薄膜的研究关键以及今后的发展方向.
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