用工业型脉冲直流等离子体增强化学气相沉积技术,在高速钢(W18Cr4V)表面沉积了Ti-Si-N复合薄膜,研究了Ti-Si-N复合薄膜的微观组织和力学性能.结果显示,薄膜相结构为纳米晶TiN和纳米晶或非晶TiSi2以及非晶相Si3N4;在Si含量为5.0 at%~28.0 at%范围内,薄膜的晶粒尺寸逐渐变大;Ti-Si-N薄膜的显微硬度相对于TiN有明显增加,最高硬度可达40 GPa;高温退火后,Ti-Si-N纳米复合薄膜的显微硬度与晶粒尺寸在800℃高温下仍然保持稳定.
参考文献
[1] | 李成明 等.[J].摩擦学学报,2002,22(zk):153. |
[2] | Shengli Ma;Yanhuai Li;Kewei Xu .Investigation on processing of industrial set-up plasma enhanced chemical vapor deposition with pulsed d.c. power[J].Surface & Coatings Technology,2000(1/3):131-135. |
[3] | Holubar P et al.[J].Surface and Coatings Technology,1999,120-121:184. |
[4] | Mitterer C. -;Beschliesser M;Losbichler P;Warbichler P;Hofer F;Gibson PN;Gissler W;Hruby H;Musil J;Vlcek J;Mayrhofer PH .Micro structure and properties of nanocomposite Ti-B-N and Ti-B-C coatings[J].Surface & Coatings Technology,1999(0):405-411. |
[5] | Li S;Shi Y et al.[J].Plasma Chemistry and Plasma Processing,1992,12:287. |
[6] | Veprek S et al.[J].Surface and Coatings Technology,1996,394:86. |
[7] | Veprek S;Nesladek P;Niederhofer A et al.[J].Nano-Structured Materials,1998,10(05):679. |
[8] | Veprek S et al.[J].Surface and Coatings Technology,2000,133-134:152. |
[9] | He J L et al.[J].Materials Chemistry and Physics,1996,44:9. |
[10] | 马胜利,李雁淮,徐可为.脉冲电压幅值对等离子体化学气相沉积TiN薄膜膜基结合行为的影响[J].金属学报,2000(01):77-80. |
[11] | Herr W;Broszeit E;Tech Univ Darmstadt Inst Mat Sci D-64283 Darmstadt Germany. .The influence of a heat treatment on the microstructure and mechanical properties of sputtered coatings[J].Surface & Coatings Technology,1997(1/3):335-340. |
[12] | Mannling H D et al.[J].Surface and Coatings Technology,2001,146-147:263. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%