液面位置对φ300mm硅单晶固液界面形状影响的数值计算

人工晶体学报, 2008, 37(6): 1571-1574.

液面位置对φ300mm硅单晶固液界面形状影响的数值计算

王学锋 ^1, , 高宇 ^2, , 戴小林 ^3, , 吴志强 ^4, , 张国虎 ^5, , 周旗钢 ^6,

1.有研半导体材料股份有限公司,北京,100088;北京有色金属研究总院,北京,100088

2.有研半导体材料股份有限公司,北京,100088;北京有色金属研究总院,北京,100088

3.有研半导体材料股份有限公司,北京,100088

4.有研半导体材料股份有限公司,北京,100088

5.有研半导体材料股份有限公司,北京,100088

6.有研半导体材料股份有限公司,北京,100088

基金项目: 国际科技合作项目(2007DFC50310)

关键词：直拉硅单晶 , 固液界面 , 液面位置 , 数值模拟

Numerical Simulation of Effect Melt Level on the Interface Shape during φ300 mm Silicon Single Crystal Growth

数值模拟技术已经成为分析和优化工业化晶体生长工艺必不可少的工具.本文利用有限元分析软件计算了φ300 mm直拉硅单晶生长过程中,不同液面位置时的晶体固液界面形状,模拟计算考虑了热传导、辐射、气流等物理现象,分析了晶体长度和液面位置对晶体生长界面形状的影响,得出了随着晶体长度的增加固液界面的凸度会增大的规律.

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液面位置对φ300mm硅单晶固液界面形状影响的数值计算

Numerical Simulation of Effect Melt Level on the Interface Shape during φ300 mm Silicon Single Crystal Growth

参考文献