溶胶-凝胶法制备BiFeO3薄膜的结构及物性研究

人工晶体学报, 2008, 37(6): 1430-1434.

溶胶-凝胶法制备BiFeO3薄膜的结构及物性研究

李丽 ^1, , 刘保亭 ^2, , 张新 ^3, , 闫小兵 ^4, , 郭颖楠 ^5,

1.河北大学物理科学与技术学院,保定,071002

2.河北大学物理科学与技术学院,保定,071002

3.河北大学物理科学与技术学院,保定,071002

4.河北大学物理科学与技术学院,保定,071002

5.河北大学物理科学与技术学院,保定,071002

基金项目: 国家重点基础研究发展计划(973计划)(2007CB616910) 河北省自然科学基金(E2008000620) 教育部科学技术研究项目(2005-546;207013) 国家自然科学基金(50572021;60876055)

关键词：铁酸铋薄膜 , 溶胶-凝胶法 , 铁电性能 , 漏电流

Structural and Physical Properties of BiFeO3 Film Made by Sol-gel Method

应用溶胶-凝胶法在Pt/Ti/SiO2/Si(001)基片上制备了BiFeO3薄膜,构架了Pt/BiFeO3/Pt电容器.采用X射线衍射仪和铁电测试仪研究了Pt/BiFeO3/Pt电容器的结构和物理性能.实验发现BiFeO3最佳的结晶温度为600 ℃,X射线衍射图谱显示BiFeO3薄膜结晶状况良好,原子力显微镜照片显示BiFeO3表面颗粒均匀.Pt/BiFeO3/Pt电容器具有良好的电学性能,在驱动电压为5 V的情况下,Pt/BiFeO3/Pt电容器的电滞回线具有良好的对称性,漏电流密度小于10-4 A/cm2,研究发现BiFeO3薄膜log(J)/log(E)关系满足空间电荷限制电流传导机制.

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