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Ti-2Al-2.5Zr合金中注入能量为75keV的N+离子, 注入剂量为3×1017/cm2和8×1017/cm2, 注入过程样品的温度低于200℃. N+离子在Ti-2Al-2.5Zr合金中的射程借助TRIM 96程序计算为1222. 注入后的样品用X射线衍射方法(XRD)以及光电子能谱方法(XPS)进行分析. XRD衍射谱表明有新相生成, 经分析为TiN和TiO2, 但这些新相的峰非常微弱, 很难区分. XPS宽程扫描谱表明注入后样品表面主要为Ti, C, N和O. XPS关于Ti2p和N1s窄程扫描谱表明N+离子注入后在合金表面确实形成了TiN和TiO2.

参考文献

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