采用直流磁控溅射技术制备超薄Au膜,用原子力显微镜观察薄膜的表面形貌.功率谱密度计算结果显示,随着溅射时间增加,高频段曲线拟合直线的斜率增大,相应的分形维数从2.579减小到2.500;而低频段曲线拟合直线的斜率减小,相应的分形维数由2.607增大到2.819,薄膜表面形貌存在多尺度行为.多重分形谱结果表明,随着溅射时间的增加,分形谱宽Δα从0.051增大到0.118,说明薄膜表面高度分布范围愈来愈宽,表面粗糙度愈来愈大,与rms研究结果一致.样品的Δf均＞0,说明样品表面最高峰位的数目均多于最低谷位的数目.
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