采用长脉冲激光对蓝宝石晶体在不同的保护气体作用下切割获得的断口进行了研究.Nd: YAG脉冲激光分别在N2、Ar、O2保护气氛下对蓝宝石晶体的(0001)面上以相同的工艺参数进行切割.蓝宝石切割断口的物相和形貌分别采用XRD和SEM进行表征.结果表明:在保护气体作用下,Ar保护气氛下的切割深度最大,断口平整,有金属光泽,检测断口处以多晶α-Al2O3相为主相,并有少量的Al相;N2保护下断口无金属光泽,有粉化现象,存在多晶α-Al2O3相为主相,并有少量的AlN相;O2保护气下切割深度最浅,而且断口表面粉化严重,检测出以多晶α-Al2O3相为主相,三种切痕条纹均与激光的切削方向相反.
参考文献
| [1] | Hong Lei;Li Lijun .A study of laser cutting engineering ceramics[J].Optics & Laser Technology,1999(8):531-538. |
| [2] | Lumley R M .Controlled Separation of Brittle Materials Using a Laser[J].American Ceramic Society Bulletin,1969,48(01):850-854. |
| [3] | Kondratenko V S .Method of Splitting Non-metallic Materials[P].US Patent:5609284,1997. |
| [4] | Wittenbecher W .The Cutting Edge of Laser Technology[J].Glass Processing,1998,75(04):101-102. |
| [5] | Dhupal D;Doloi B;Bhattacharyya B .Pulsed Nd:YAG Laser Turning of Micro-groove on Aluminum Oxide Ceramic (Al2O3)[J].International Journal of Machine Tools and Manufacture,2008,48(02):236-248. |
| [6] | J. Pascual-Cosp;A.J. Ramirez del Valle;J. Garcia-Fortea .Laser cutting of high-vitrified ceramic materials: development of a method using a Nd: YAG laser to avoid catastrophic breakdown[J].Materials Letters,2002(4):274-280. |
| [7] | Black I.;Chua KL. .LASER CUTTING OF THICK CERAMIC TILE[J].Optics & Laser Technology,1997(4):193-205. |
| [8] | Yao T .The Study on the Anisotropy of Meniscus in the Growing Sapphire[J].Acta Aeronautica Et Astronautica Sinica,2007,20(01):78-81. |
| [9] | B. S. Yilbas .Laser cutting quality assessment and thermal efficiency analysis[J].Journal of Materials Processing Technology,2004(0):2106-2115. |
| [10] | Steen W M.Laser Material Processing[M].Lodon:Springer-Verlag,1991:129-131. |
| [11] | Miotello A;Kelly R .Critical Assessment of Thermal Models for Laser Sputtering at High Fluences[J].Applied Physics Letters,1995,67(24):3535-3537. |
| [12] | Salleo A .High-power Laser Damage in Fused Silica[D].PhD Thesis of University California,2001. |
| [13] | Anoop N. Samant;Narendra B. Dahotre .Laser machining of structural ceramics-A review[J].Journal of the European Ceramic Society,2009(6):969-993. |
| [14] | Shackelford J F;Doremus R H.Ceramic and Glass Materials Structure[A].Springer-verlag,2008:12-14. |
| [15] | Pedraza A J;J W P;Meyer H M et al.Braski X-ray Photoelectron Spectroscopy of UV Laser Irradiated Sapphire and Alumina[J].Journal of Materials Research,1994,9(09):2251-2257. |
| [16] | Saito T M K .Absorption of Nitrogen by Some Pure Metals[J].Bulletin of the Research Institute of Mineral Dressing and Metallurgy,1953,8(02):141-148. |
| [17] | Ansell S;Krishnan S;Weber JKR;Felten JJ;Nordine PC;Beno MA;Price DL;Saboungi ML .Structure of liquid aluminum oxide[J].Physical review letters,1997(3):464-466. |
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