采用射频磁控溅射方法在Si衬底上制备了不同掺杂量的La掺杂ZnO(ZnO∶La)薄膜.用X射线衍射(XRD)、扫描电子显微镜(SEM)、紫外-可见分光光度计和光致荧光发光(PL)等表征技术,研究了不同掺杂量对ZnO∶ La薄膜的微观结构和光学特性的影响.结果表明,所有薄膜均只出现的(002)衍射峰,表明La3+可以替代ZB2或者进入ZnO晶格间隙,并未改变ZnO的六角纤锌矿结构.通过计算可知La掺杂可以抑制ZnO的晶粒增长.可见光范围的透过率超过80％,同时随着La掺杂量的增加,薄膜的光学带隙值逐渐增大.通过对光致发光谱的研究表明,La掺杂可以增强ZnO薄膜室温下的紫外光发光强度.
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