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离子氮化具有工件变形小、渗速快、节能环保等优点,能有效提高金属零部件的表面硬度、耐磨损和耐腐蚀等性能.然而受气体放电特性和电场效应的影响,工件形状对表面温度的均匀性影响很大,出现表面打弧、边缘效应和空心阴极效应等问题.为了克服传统直流离子渗氮的缺点,近年来出现了一些射频离子氮化、等离子体浸没离子注入、活性屏渗氮以及空心阴极氮化等新技术.

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