系统总结了VO2薄膜常用的制备方法,并针对目前热色智能窗用VO2薄膜存在的问题,如透过率低、调节率不理想等,详细综述了提高VO2薄膜性能的工艺改进途径,包括沉积减反层、加入折射率小的材料、掺杂等,以揭示改善VO2薄膜的最佳途径,为推进VO2智能窗的实用化提供依据.
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