采用超声雾化技术,以醋酸锌水溶液为前驱体溶液,在加热的玻璃衬底上制备得到ZnO薄膜.研究了不同前驱体溶液浓度和不同加热温度条件下制得的ZnO薄膜的微观结构和光学性能.测试结果表明,ZnO薄膜为六角纤锌矿结构,在合适的条件下可以制备出沿(002)晶面取向生长的样品,具有优良的均匀性和致密性.同时在可见光区也表现出80%以上的高透过率.
参考文献
| [1] | Look DC. .Recent advances in ZnO materials and devices[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,2001(1/3):383-387. |
| [2] | Jeong WJ.;Park GC. .Electrical and optical properties of ZnO thin film as a function of deposition parameters[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2001(1/4):37-45. |
| [3] | Chen M.;Sun C.;Gong J.;Huang RF.;Wen LS.;Pei ZL. .ZAO: an attractive potential substitute for ITO in flat display panels[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,2001(2/3):212-217. |
| [4] | Djaoued P;Badilescu .Sol-gel prepared ITO films for electrochromicsystems[J].Thin Solid Films,1997,293:108. |
| [5] | Brinzari V;Korotcenkov G;Golovano V .Factors influencing the gas sensing characteristics of tin dioxide films deposited by spray pyrolysis:understanding and possibilities of control[J].Thin Solid Films,2001,391:167. |
| [6] | Ayouchi R.;Leinen D.;Martin F.;Gabas M.;Dalchiele E.;Ramos-Barrado JR. .Preparation and characterization of transparent ZnO thin films obtained by spray pyrolysis[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2003(1/2):68-77. |
| [7] | 叶志镇,陈汉鸿,刘榕,张昊翔,赵炳辉.直流磁控溅射ZnO薄膜的结构和室温PL谱[J].半导体学报,2001(08):1015-1018. |
| [8] | Pramod S Patil .Versatility of chemical spray pyrolysis technique[J].Materials Chemistry and Physics,1999,59:185. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%