以(CH3COO)2Zn·2H2O为前驱物,利用溶胶-凝胶旋转涂膜法以普通玻璃为基底制备ZnO薄膜.分别采用X射线衍射仪、紫外-可见分光光度计和扫描电子显微镜等对ZnO薄膜的物相组分、透射率和表面形貌进行测量与表征.研究了热处理温度对ZnO薄膜的物相结构和光学特性的影响.实验结果表明,ZnO薄膜的物相结构和可见光透射率都与热处理温度有关,随着热处理温度升高,ZnO薄膜的晶粒尺寸增大,晶格常数逐渐减小,薄膜的透射率增大.
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