薄膜的制备方法对薄膜的性能和应用有很大影响,精密的电子器件、光学装置等越来越需要高品质的薄膜,这些都需要采用先进的制备方法来制备.结合近年来实验、计算机模拟及理论计算等各方面的研究结果,对应用团簇离子束法制备薄膜及研究团簇粒子方面的研究进展进行了评述,分析了影响薄膜性能的因素,并初步探讨了其成膜机理及团簇粒子的性质.
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