采用脉冲偏压多弧离子镀技术在Hss-Al高速钢上涂镀(Ti,Al)N/TiN/(Ti,Al)N多层复合涂层.所用设备为复合八阵弧离子镀膜生长系统.简要介绍了多层复合膜的镀层工艺过程.鉴于复合涂层中的Al含量对涂层的性能特别是抗磨损性能有极重要的影响,实验中重点考察了脉冲偏压幅对Al含量的影响.同时测试了复合涂层的vickers硬度与偏压幅值的关系.研究结果得出,随着脉冲偏压幅值的增加,涂层中Al含量先增加,然后减少,偏压幅值为-150v时,Al含量高达36.41at%;偏压幅与涂层显微硬度的关系有相似的规律,在偏压幅值为-150V时,7层复合膜的vickerB硬度达2750 MPa左右,10层复合膜的硬度约2880 MPa.
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