本文主要介绍了一种闭锁电热微开关的制备及性能测试.利用双层膜电热微驱动器,基于双悬臂梁的结构设计,实现开关的驱动和闭锁.采用MEMS表面徼加工技术完成所设计微开关器件的制备,并对其进行性能测试.结果表明,施加的脉冲电信号的最佳占空比为10%,并测得电阻丝能承受的最大功耗为90mW,单臂粱的翘曲高度为58 μm,所得结果能够满足设计的闭锁电热微开关的工作需要.将本次设计的微开关连接到外接电路中,并施加时序双脉冲电信号,测得了外接电路的导通信号.
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