利用射频磁控溅射技术在不同温度的(100)Si和玻璃衬底上成功地制备了c轴择优取向的Mg0.1Zn0.9O薄膜.通过X射线衍射(XRD)、场发射扫描电镜(FESEM)、紫外可见光分光光度计和光致发光谱研究了衬底温度对Mg0.1Zn0.9O薄膜结构、表面形貌和光学性能的影响,结果表明,在衬底温度为400℃时生长的Mg0.1Zn0.9O薄膜具有很好的c轴取向和较好的光学性能.用激发波长为300nm的氙灯作为激发光源得到不同衬底温度下Mg0.1Zn0.9O薄膜的室温PL谱.分析表明,紫外发光峰与薄膜的结晶质量密切相关,蓝光发射与氧空位有关.简单探讨了衬底温度影响紫外光致发光峰红移和蓝移的可能机理.
参考文献
| [1] | Tang ZK.;Yu P.;Kawasaki M.;Ohtomo A.;Koinuma H.;Segawa Y.;Wong GKL. .Room-temperature ultraviolet laser emission from self-assembled ZnO microcrystallite thin films[J].Applied physics letters,1998(25):3270-3272. |
| [2] | Seema Rani;Poonam Suri et al.Synthesis of nanocrystalline ZnO powder via sol-gel route for dye-sensitized solar cells[J].Solar Energy Materials and Solar Cells,2008,92:1639. |
| [3] | Tadatsugu Minami .Substitution of transparent conducting oxide thin films for indium tin oxide transparent electrode applications[J].Thin Solid Films,2008,516:1314. |
| [4] | Oleg Lupan;Guangyu Chai;Lee Chow .Novel Hydrogen Gas Sensor Based On Single Zno Nanorod[J].Microelectronic engineering,2008(11):2220-2225. |
| [5] | Casteleiro, C;Gomes, HL;Stallinga, P;Bentes, L;Ayouchi, R;Schwarz, R .Study of trap states in zinc oxide (ZnO) thin films for electronic applications[J].Journal of Non-Crystalline Solids,2008(19/25):2519-2522. |
| [6] | Wang Wenwen;Diao Xungang;Wang Zheng .Optical,electilcal and infrared emissing properties of DC magnetron sputtered ZnO:Al thin films[J].J Beijing University of Aeronautics and Astronautics,2005,31(02):236. |
| [7] | Ohtomo A.;Koida T.;Masubuchi K.;Koinuma H.;Sakurai Y. Yoshida Y.;Yasuda T.;Segawa Y.;Kawasaki M. .MgxZn1-xO as a II-VI widegap semiconductor alloy[J].Applied physics letters,1998(19):2466-2468. |
| [8] | 张德恒,张锡健,王卿璞,孙征.MgZnO薄膜及其量子阱和超晶格的发光特性[J].发光学报,2004(02):111-116. |
| [9] | 徐小丽,马书懿,陈彦,孙小菁,魏晋军,张国恒.衬底温度对磁控溅射法制备ZnO薄膜结构及光学特性的影响[J].功能材料,2007(05):746-749. |
| [10] | 于元勋,魏显起,满宝元.生长温度对Si衬底ZnO薄膜结构的影响[J].山东教育学院学报,2006(06):134-135,149. |
| [11] | 吴小丽,陈长乐,韩立安,罗炳成,高国棉,朱建华.衬底温度对PLD法生长的Mg0.05Zn0.95O薄膜结构和发光特性的影响[J].物理学报,2008(06):3735-3739. |
| [12] | XU Pengshou,Sun Yuming,Shi Chaoshu,XU Faqiang,Pan Haibin.Electronic structure of ZnO and its defects[J].中国科学A辑(英文版),2001(09):1174-1181. |
| [13] | Zhang Deheng;Wang Qingpu;Xue Zhongying .Ultra-violet photoluminescence of ZnO films on different substrates[J].Acta Physica Sinica,2003,52(06):1484. |
| [14] | 傅竹西,林碧霞,祝杰,刘丽萍,彭小滔,贾云波.MOCVD方法生长的氧化锌薄膜及其发光特性[J].发光学报,2001(02):119-124. |
| [15] | Vanheusden K;Seager C H;Warren W L et al.Photoluminescence and oxygen vacancies in ZnO phosphors[J].Applied Physics Letters,1996,68:403. |
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