本文将单相CuO薄膜用于丙烯的催化燃烧.利用脉冲喷雾热蒸发化学气相沉积(PSE-CVD)制备了CuO薄膜.对沉积条件进行了优化,并对所得薄膜的物相、表面形态和光学性质进行了表征.结果表明400℃ 、4 Hz和7 ms条件下能获得最快的生长速率.所得薄膜为单相CuO结构,其光学能隙为1.8～1.86 eV.催化特性测试表明氧化铜薄膜可以在很低的温度下完全燃烧丙烯,其催化性能可与贵金属相比.因此,氧化铜在挥发性有机化合物的催化燃烧中具有很强的应用前景.
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