以正硅酸乙酯、异丙醇铝为先驱体,甲基三乙氧基硅烷为有机硅烷,采用溶胶-凝胶旋涂方法在普通玻璃和硅片表面镀制纳米复合薄膜.通过FT-IR、VIS透射光谱的分析及薄膜表面接触角的测量,研究了Al2 O3与SiO2配比和热处理温度对复合薄膜的化学结构、透光率及疏水性的影响.结果表明该薄膜具有疏水、致密、透明等性能;Al2 O3的加入未降低复合薄膜的可见光透光率,其中经400℃热处理后不同配比复合薄膜在可见光区的透光率均大于85%,且不影响复合薄膜的疏水性.
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