利用微波电子回旋共振等离子体化学气相沉积技术,通过改变微波输入功率的方法,沉积了具有不同结构特征的氟化非晶碳(α-C:F)薄膜.随着微波功率从M0w升高到560w,薄膜的光频介电常数从2.26降至1.68,红外光谱(FTIR)分析表明薄膜的键结构由以CF基团为主变化到CF与cF2基团共存.由于CF2基团的极化比CF基团弱,薄膜中CF2基团的增加可能是导致光频介电常数减小的因素.
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