用电刷技术在不锈钢基体一侧表面上刷镀了Cu膜,用电镀技术在不锈钢基体一侧表面或双侧表面上制备Ni膜.用梁三点弯曲法在自制的设备上测量不锈钢基体以及不锈钢基体上不同厚度Cu膜和Ni膜的弹性模量E.研究表明:在测量的膜厚范围内(7μm～15 μm),Cu膜和Ni膜的弹性模量E不随膜厚变化,并且接近各自块材的弹性模量.
参考文献
| [1] | Knapp JA.;Myers SM.;Barbour JC.;Friedmann TA.;Ager JW. Monteiro OR.;Brown IG.;Follstaedt DM. .Finite-element modeling of nanoindentation for evaluating mechanical properties of MEMS materials[J].Surface & Coatings Technology,1998(0):268-275. |
| [2] | Jamting AK.;Swain MV.;Schwarzer N.;Bell JM. .INVESTIGATION OF THE ELASTIC MODULUS OF THIN FILMS USING SIMPLE BIAXIAL BENDING TECHNIQUES[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1997(0):304-309. |
| [3] | Karimi A.;Kruml T.;Martin JL.;Shojaei OR. .CHARACTERISATION OF TIN THIN FILMS USING THE BULGE TEST AND THE NANOINDENTATION TECHNIQUE[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1997(0):334-339. |
| [4] | Greek Staffan;Johansson Stefan;Furtsch Matthias;Rump Arnold;Ericson Fredric .Mechanical characterization of thick polysilicon films: Young's modulus and fracture strength evaluated with microstructures[J].Journal of Micromechanics and Microengineering,1999(3):245-251. |
| [5] | Allen M G;Mehregang M;Howe R T et al.Microfabricated Structures for the in Situ Measurement of Residual Stress,Young's Modulus,and Ultimate Strain of Thin Films[J].Applied Physics Letters,1987,51(04):241-254. |
| [6] | El Khakani M A;Chaker M;Jean A.Hardness and Young's Modulus of Amorphous α-SiC Thin Films Determined by Nanoindentation and Bulge Tests[J].Journal of Materials Research,1994(09):96-103. |
| [7] | Andre Rouzaud;Barbier E;Ernoult J et al.A Method for Elastic Modulus Measurements of Magnetron Sputtered Thin Films Dedicated to Mechanical Applications[J].Thin Solid Films,1995,270:270-274. |
| [8] | 任凤章,鞠新华,周根树,胡志忠,赵文轸,郑茂盛.鼓泡法薄膜力学性能测试的研究现状[J].稀有金属材料与工程,2001(05):321-325. |
| [9] | 任凤章,周根树,赵文轸,胡志忠,郑茂盛.悬臂梁法测量不锈钢基体上铜膜和银膜残余应力[J].稀有金属材料与工程,2003(06):478-480. |
| [10] | J. Meneilia;E. Quandt .Determination of elastic modulus of thin films and small specimens using beam bending methods[J].Journal of Materials Research,1999(5):2152-2161. |
| [11] | Baker S P;Nix W D.Mechanical Properties of Compositionally Modulated Au-Ni Thin Films[J].Journal of Materials Research,1994(09):3132-3143. |
| [12] | 宿彦京 .薄膜力学行为研究[D].北京科技大学,2000. |
| [13] | 林毓锜;陈瀚;楼志文.材料力学[M].西安:西安交通大学出版社,1986:122. |
| [14] | Small M K;Daniels B J;Clemens B M.The Elastic Biaxial Modulus of Ag-Pd Multilayered Thin Films Measured Using the Bulge Test[J].Journal of Materials Research,1994(09):25-30. |
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