检测了用微波等离子体化学气相淀积制备的YSZ薄膜的光学性能.样品对230—900nm光的透过率在72%左右.用交流阻抗谱技术测定了YSZ薄膜在100—700℃的电导性能、以倒扭摆法检测了样品的低频内耗.并分析了YSZ薄膜中氧空位激活和晶界原子弛豫引起的电导变化.
The optical properties of YSZ thin films synthesized by microwave plasma CVD process have been examined. The transmittances in the range of 230-900nm wavelength are about 72%. The technique of ac impedance was used to measure the conductivity of YSZ films
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| [14] | VanHasselBA,BoukampBA,BurggraafAJ．SolidStateIonics．1992:53—56(PartⅡ) |
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