基于谐波探测技术测量材料导热系数和热扩散系数的基本原理,给出3ω法用于多层纳米薄膜结构热物性实验表征的方法.考虑了层间接触热阻的作用,在频域内定义了热阻抗的概念.理论分析了各层纳米薄膜的导热系数、热扩散系数等热参数对加热膜温度波动影响的敏感性.将敏感系数与实验数据处理相结合,利用三次谐波的实部和虚部分量测量了ZrO2/SiO2增透膜多层膜结构中各层的导热系数和热扩散系数.该方法可用来有效表征其他微纳米结构的热性能.
参考文献
| [1] | Raudzis CE.;Schatz F.;Wharam D. .Extending the 3 omega method for thin-film analysis to high frequencies[J].Journal of Applied Physics,2003(10 Pt.1):6050-6055. |
| [2] | Olson B W;Graham S;Chen K .A Practical Extension of the 3?Method to Multiplayer Structures[J].Review of Scientific Instruments,2005,76(01):1-6. |
| [3] | Cahill D G .Thermal Conductivity Measurement from 30 to 750 K:the 3?Method[J].Review of Scientific Instruments,1990,61(02):802-808. |
| [4] | Borca-Tasciuc T.;Chen G.;Kumar AR. .Data reduction in 3 omega method for thin-film thermal conductivity determination[J].Review of Scientific Instruments,2001(4):2139-2147. |
| [5] | Yamane T;Nagal N;Katayama S .Measurement of Thermal Conductivity of Silicon Dioxide Thin Films Using a 3?[J].Method.J.Appl.Phys,2002,91(12):9772-9776. |
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