薄膜体声波滤波器的材料、设计及应用

材料导报, 2006, 20(11): 21-24.

薄膜体声波滤波器的材料、设计及应用

蒋松涛 ^1, , 吴孟强 ^2, , 吴勇 ^3, , 张树人 ^4,

1.电子科技大学电子薄膜与集成器件国家重点实验室,成都,610054

2.电子科技大学电子薄膜与集成器件国家重点实验室,成都,610054

3.电子科技大学电子薄膜与集成器件国家重点实验室,成都,610054

4.电子科技大学电子薄膜与集成器件国家重点实验室,成都,610054

基金项目: 四川省青年基金(JS0303001)

关键词：体声波 , 谐振器 , 滤波器 , 压电薄膜

Materials, Devices Design and Applications of Thin Film Bulk Acoustic Wave Filters

薄膜体声波谐振器及滤波器具有工作频率高、工艺简单、尺寸小、易于集成等优点,成为目前应用于高频通信前置滤波器的首选.系统介绍了用于薄膜体声波谐振器的几种主要材料(AlN、ZnO、PZT)的具体特点、制备工艺及薄膜体声波谐振器与滤波器的结构、设计及其应用.

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薄膜体声波滤波器的材料、设计及应用

Materials, Devices Design and Applications of Thin Film Bulk Acoustic Wave Filters

参考文献