阐述了Cu-W(Mo)薄膜结构的演变与各种条件的关系,并分析了结构演变后薄膜的性能变化.结果表明,沉积条件、退火、离子束的轰击、辐照和薄膜成分比的变化都能引起薄膜的结构演变,其中离子束的轰击与辐熙是研究薄膜结构变化的主要手段.
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