采用磁控溅射共沉积法制备Al-Pb复合薄膜,运用TEM、SEM、EDX和电阻-温度仪对薄膜微观结构和电性能进行研究.结果表明,Al-Pb薄膜具有温度敏感性,电阻温度系数(TCR)可达8.4×10-3℃-1.薄膜微观结构含富Al基体相和富Pb第二相,呈两相组织.随着厚度的增大,第二相粒子及基体相晶粒粒度增大,界面密度降低,界面电子散射效应减弱,电阻率下降,TCR值增大.与Al膜和移去Al基体形成的Pb膜的电性能对比研究显示,Al-Pb薄膜存在并联导电机制,电阻率受两相电阻率和体积分数的影响.
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