用氧气-乙炔火焰法在氧化铝陶瓷片上沉积出了金刚石薄膜，并观察了薄膜的形貌结构及其在基片上的分布规律．对基片进行适当的预处理，可以提高金刚石薄膜在基片上的成核密度．认为氧化铝陶瓷片与沉积金刚石薄膜之间易形成过渡层，初步探讨了在氧化铝陶瓷片上沉积金刚石薄膜的机理．
Dianmond films were deposited on Al2O3 ceramic substrates by oxygen-acetylene flame, the morphologics and their distribution of deposited films on the substrate surfaces were also observed.Proper pretreatment of substrates can increase the density of diamond nuclei. An intermediate eas-ily be formed betweem Al2O3 ceramics and deposited diamond filmes. The mechanism of depositing diamond films on Al2O3 ceramics was preliminary analyzed.
参考文献
| [1] | Hirose Y, Kondo N. Japan Appl. Phys. Spring, 1988. Mecting, 1988. 434. 2 Hanssen L M, Carrington W A, Butler J E, et al. Mater. Lett., 1988, 7: 289. 3 Ravi K V, Koch C A, Hu H S, et al. J. Mater. Res., 1990, 5: 2356. 4 王若宝, Smith F W. 薄膜科学与技术, 1992, 6 (1): 1. 5 Ch -Mayying, Bhushan Bharat, Lutgard C, et al. J. Mater. Res., 1992, 7 (11): 3010. 6 Johuson Willian B, Sonuparlak B. J. Mater. Res., 1993, 8 (5): 1169. |
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