化学气相沉积金刚石膜是聚优异力学、电学、热学性能于一体的材料.金刚石激光打孔过程中存在特有的石墨化现象使得其温度场的分布有别于其他材料,因而,开展CVD金刚石膜激光打孔温度场研究对于理解热加工机理和进行参数优化具有重要的指导意义.本文首先建立了考虑金刚石石墨化过程的激光打孔热力学模型,根据有限元模型开展对CVD金刚石膜激光打孔有限元仿真研究,得到激光打孔温度场和金刚石石墨化的分布规律,并讨论激光能量、脉冲宽度、重复频率对单个脉冲去除量和石墨化程度的影响.仿真结果表明:单个脉冲平均去除量和石墨化程度均随着激光能量、脉冲宽度、重复频率的增加而增加,但激光能量的影响最为显著;当激光能量取0.5～1.6 J,脉冲宽度取300～800 ns,重复频率取30～60 Hz时既可以得到很高的加工效率同时又可以获得热影响区域较小的加工效果.
Chemical vapor deposited (CVD) diamond film has bright application foreground in many high-tech fields for its a series of outstanding properties. The temperature field distribution of CVD diamond film laser drilling process is different from other materials because of its diamond graphitization taking place during the process. As a result, studies on thermal field distribution have great importance on both the investigation of the processing mechanism and the optimization of drilling parameters. In this paper, a thermodynamics model considering graphitization of CVD diamond is built at first. Based on the model, FEM simulation research is conducted on laser drilling CVD diamond film. Through simulation the temperature field distribution and the degree of diamond graphitization are presented. Besides, the relation between laser drilling results (average removal rate per pulse and graphitization depth) and laser drilling parameters (laser energy, pulse width, repetition rate) is investigated. It is found that average removal rate per pulse and graphitization depth increases with the increase of laser energy, pulse width, repetition rate, with the laser energy as a key factor. Simulation results show that when choosing the drilling parameters with laser energy 0.5～1.6 J, the pulse width 300～800 ns, repetition rate 30～60 Hz, we could obtain high efficiency together with small heat-affected zone.
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