倾斜沉积制备雕塑薄膜的研究进展

稀有金属材料与工程, 2008, 37(8): 1317-1322.

倾斜沉积制备雕塑薄膜的研究进展

肖秀娣 ^1, , 董国平 ^2, , 余华 ^3, , 范正修 ^4, , 贺洪波 ^5, , 邵建达 ^6,

1.中国科学院上海光学精密机械研究所,上海,201800;中国科学院研究生院,北京,100039

2.中国科学院上海光学精密机械研究所,上海,201800;中国科学院研究生院,北京,100039

3.中国科学院上海光学精密机械研究所,上海,201800;中国科学院研究生院,北京,100039

4.中国科学院上海光学精密机械研究所,上海,201800

5.中国科学院上海光学精密机械研究所,上海,201800

6.中国科学院上海光学精密机械研究所,上海,201800

基金项目: 国家自然科学基金(60778026) 上海市青年科技启明星计划(07QB14006)

关键词：倾斜沉积 , 雕塑薄膜 , 各向异性

Study Progress on Sculptured Thin Films by Glancing Angle Deposition

倾斜沉积是一种新型的薄膜沉积技术.通过制备过程中基片的旋转和倾斜,可以制备出斜柱状、之字形、螺旋状、S形以及C形等各种形状的雕塑薄膜.雕塑薄膜可以实现许多传统薄膜无法实现的光学性质,为光学薄膜的设计与制备开辟了新的途径.本文综述了雕塑薄膜的制备方法,分析了雕塑薄膜的结构特征及影响因素,并阐述了其在光学领域的广泛应用前景.

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材料期刊网

倾斜沉积制备雕塑薄膜的研究进展

Study Progress on Sculptured Thin Films by Glancing Angle Deposition

参考文献