采用喷雾热解法分别在普通钠钙玻璃、含SiO2过渡层与TiO2过渡层的玻璃上制备了F掺杂SnO2薄膜,比较了不同过渡层上生长的F掺杂SnO2薄膜的表面形貌特点,分析了过渡层对F掺杂SnO2膜层的光电性能的影响.结果表明,过渡层种类对F掺杂SnO2薄膜各项性能影响很大,在SiO2薄膜过渡层上制备的F掺杂SnO2薄膜晶粒最小且表面致密,在TiO2过渡层制备的F掺杂SnO2薄膜晶粒最大,在玻璃上生长的F掺杂SnO2薄膜较为疏松,以SiO2为过渡层制备的F掺杂SnO2薄膜光电性能最佳,其平均可见光透过率为82.9％,电阻率为5.33×10-4 Ω·cm,适合喷雾热解法制备性能优良的玻璃基F掺杂SnO2薄膜.
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