材料功能的多元化以及各种元器件的微型化、集成化,导致薄膜的应用领域也就越来越广泛,对薄膜的制备技术的要求就越来越高.本文综述了近来溶胶-凝胶法在光学、电学、耐磨、耐蚀等功能薄膜制备中的研究及展望.
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