用RF溅射方法在不同的基片温度下制备了非晶态和晶态NdFeB溥膜合金。研究了薄膜合金的磁各向异性。在600℃溅射得到的晶态样品具有强的垂直各向异性和高的矫顽力。由非晶态晶化得到的晶态合金也呈现了较强的垂直各向异性。
The amorphous and crystalline Nd-Fe-B films were prepared by RF sputtering at different substrate temperatures. The crystalline specimens, prepared at 600℃ have strong perpendicular anisotropy and high coercivity. And the cystallized alloy from amorphous state has strong perpendicular anisotropy too.
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