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采用多弧离子镀技术交互沉积工艺,使用合金靶与纯Ti靶在齿轮材料40Cr基体表面实现梯度Ti1-xAlxN膜层的制备,通过研究不同x值时梯度Ti1-xAlxN膜层的表面形貌、组织结构及膜层显微硬度、结合力等性能,探求较优的工艺参数配比.结果表明,在工艺参数相同的条件下,不同x值,梯度Ti1-xAlxN膜层厚度相差不大;显微硬度先随x值的增大而先增大后降低;结合力随x值的增大而降低,x值为0.67时梯度Ti1-xAlxN膜层综合性能最优.

参考文献

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