采用Li3PO4为靶材,在高纯N2气氛中通过射频磁控溅射的方法制备了非晶态结构的固态电解质LiPON薄膜.结果表明,在溅射功率150W、工作气压为1.5Pa时,LiPON薄膜离子电导率达3×10-6S/cm,电化学稳定窗口为5V.
参考文献
| [1] | Bates J B;Dudney N J;Lubben D C et al.Thin-film rechargeable lithium batteries[J].Journal of Power Sources,1995,54:58. |
| [2] | Bates J B;Gruzalski G R;Dudney N J et al.Rechargeable thin-film lithium batteries[J].Solid State Ionics,1994,70-71:619. |
| [3] | Bates J.B.;Dudney N.J. .Preferred Orientation of Polycrystalline LiCoO_2 Films[J].Journal of the Electrochemical Society,2000(1):59-70. |
| [4] | Raffaelle R P;Harris J D;Hehemann D et al.A facile route to thin-film solid state lithium microelectronic batteries[J].Journal of Power Sources,2000,89:52. |
| [5] | Bates J B;Dudney N J;Gruzalski G R et al.Electrical properties of amorphous lithium electrolyte thin films[J].Solid State Ionics,1992,53-56:647. |
| [6] | 赵胜利,文九巴,李海涛,秦启宗.LiPON薄膜结构与电化学性能研究[J].材料热处理学报,2005(04):17-21. |
| [7] | 刘文元,傅正文,秦启宗.锂磷氧氮（LiPON）薄膜电解质和全固态薄膜锂电池研究[J].化学学报,2004(22):2223-2227. |
| [8] | Elmoudane M;Et-tabirou M;Hafid M .Glass-forming regin in the system Li3PO4-Pb3(PO4)2-BiPO4(Li2O-PbO-Bi2O3-P2O5)and its ionics conductivity[J].Aterials Res Bull,2000,35(02):279. |
| [9] | Bates J B;Dudney N J;Gruzalski G R et al.Fabrication and characterization of amorphous lithium electrolyte thin films and rechargeable thin film batteries[J].JOURNAL OF POWER SOURCES,1993,43-44:103. |
| [10] | Yu XH.;Jellison GE.;Hart FX.;Bates JB. .A STABLE THIN-FILM LITHIUM ELECTROLYTE - LITHIUM PHOSPHORUS OXYNITRIDE[J].Journal of the Electrochemical Society,1997(2):524-532. |
| [11] | Hamon Y;Douard A;Sabary F;Marcel C;Vinatier P;Pecquenard B;Levasseur A .Influence of sputtering conditions on ionic conductivity of LiPON thin films[J].Solid state ionics,2006(3/4):257-261. |
| [12] | Lee S J;Bae J H;Lee H W et al.Electrical conductivity in Li-Si-P-O-N oxynitride thin-films[J].Journal of Power Sources,2003,123:61. |
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