用脉冲激光沉积法在斜切(001)SrTiO3单晶基片上生长了c轴取向的YBa2Cu3O7-δ超导薄膜,在斜切(001)LaAlO3单晶基片上生长了Ba0.1Sr0.9TiO3/YBa2Cu3O7-δ双层薄膜,并用扫描电镜和透射电镜对薄膜组织进行了表征.结果表明,在1°～3°斜切的SrTiO3基片上生长的YBa2Cu3O7-δ薄膜,呈现台阶流动(step flow)到三维岛状生长的转变;而6°～15°斜切基片上生长的YBa2Cu3O7-δ薄膜为完全台阶流动生长.在1.2°斜切的LaAlO3基片上原位制备了良好异质外延生长的Ba0.1Sr0.9TiO3/YBa2Cu3O7-δ双层薄膜.在77 K,1 MHz频率和±30 V直流偏压下,测定了其电容-电压特性,确定其介电常数、可调谐性和品质因数分别为1200,60%和133.表明该Ba0.1Sr0.9TiO3薄膜可应用于在液氮温度下工作的可调谐微波器件.
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