纳米材料的化学组分及含量影响其光、电、声、热、磁等物理性能,电子显微分析是表征纳米晶体化学组分的重要方法之一.本文综述了X-射线能谱(EDS)、X-射线波谱(WDS)、电子能量损失谱(EELS)和选区电子衍射(SAED)等现代电子显微分析技术在表征纳米晶体化学组分、形貌、尺寸和结构等方面的应用及其研究进展,并比较了这些分析方法存在的差异,提出了其应用中存在的不足及今后的研发方向.
The chemical compositions and their content of nanomaterials have important influence on their physical properties with respect to the optics, electrics, acoustics, calorifics, magnetism and so on. Electron microanalysis was one of important methods to characterize chemical composition of nanocrystallites. This paper reviewed the latest application and progress of modern electron microanalysis techniques such as energy-dispersive X-ray spectroscopy (EDS), wavelength-dispersive X-ray spectroscopy (WDS), electron energy loss spectroscopy (EELS) and selected area electron diffraction (SAED) in the characterization of chemical composition, morphology, size and phase structure of nanocrystallites. The differences among these analytic methods were comparatively discussed. Their disadvantages in the application and developing direction in the future were also indicated.
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