采用化学镀工艺在p型(100)单晶硅表面制备了2种Ni-Co-P镀层,对比分析其显微结构和性能.结果表明:Ni48Co46P6镀层为非晶和纳米晶混合结构,表面均匀分布着直径0.2 ～ 3.5 μm的球状团簇.而Ni22Co74P4镀层为单相密排六方结构,含有强烈的(0002)晶面择优取向,表面由纳米级梭状团簇和微米级苞状团簇混合而成.在3.5％ NaCl溶液中,2种镀层均表现出活化-钝化-过钝化的腐蚀行为,其中Ni48Co46P6镀层的耐蚀性能较好.而在1.0％ H2SO4溶液中,2种镀层的耐蚀性能均大幅下降.与Ni48Co46P6镀层相比,Ni22Co74P4镀层的室温电阻率略有降低,饱和磁化强度和矫顽力显著升高.
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