采用等离子体浸没与离子注入装置,以CF4和CH4作为源气体,在Si(100)基片上制备了含氟量不同的一系列氟化非晶态碳膜.通过XPS、FTIR和Raman对其结构进行了表征.采用躺滴法测量薄膜与双蒸水之间的接触角.薄膜硬度通过纳米压痕仪进行测量.XPS和FTIR结果表明存在C-CF、C-Fx基团和少量的氧.我们认为薄膜中存在的氧元素是由于薄膜在正常存放时发生了时效过程,其中的悬挂键发生化学吸附反应引起的.Raman和接触角测量结果表明,随着氟元素含量的逐渐增加,薄膜从典型的类金刚石状结构逐渐转化为类聚合物状结构,接触角逐渐增大.纳米压痕测量结果表明,氟元素的加入使得薄膜的硬度有很大程度的降低.
参考文献
| [1] | Thomson L A;Law F C;Rushton N et al.[J].Biomaterials,1991,12:37-40. |
| [2] | Veli-Matti .[J].Diamond and Related Materials,2001,10:153-160. |
| [3] | Niedzielski P;Mitura S et al.[J].Diamond and Related Materials,1997,6:721-724. |
| [4] | Robertson J. .Diamond-like amorphous carbon [Review][J].Materials Science & Engineering, R. Reports: A Review Journal,2002(4/6):129-281. |
| [5] | Valentini L.;Kenny JM.;Lozzi L.;Santucci S.;Braca E. .Relationship between the optical and mechanical properties of fluorinated amorphous carbon thin films[J].Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites,2001(3):153-159. |
| [6] | Donnet C. .Recent progress on the tribology of doped diamond-like and carbon alloy coatings: a review[J].Surface & Coatings Technology,1998(1/3):180-186. |
| [7] | Hakovirta M;Verda R et al.[J].Diamond and Related Materials,2001,10:1486-1490. |
| [8] | Pieter B Leezenberg;William H Johoston et al.[J].Journal of Applied Physics,2001,89(06):3498-3507. |
| [9] | 杨子斌.基础医学[M].哈尔滨:黑龙江科学技术出版社,2000:242. |
| [10] | Freire Jr F L;Jacobsohn L G et al.[J].Diamond and Related Materials,2001,10:125-131. |
| [11] | Jung HS.;Park HH. .Structural and electrical properties of co-sputtered fluorinated amorphous carbon film[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2002(0):248-0. |
| [12] | Hatada R;Baba K .[J].Nuclear Instruments and Methods in Physics Research B:Beam Interaction with Materials and Atoms,1999,148:655-658. |
| [13] | CHU P K;Huang N et al.[J].Review of Scientific Instruments,2001,72(03):1660-1665. |
| [14] | Wagner C D .[J].Journal of Electron Spectroscopy and Related Phenomena,1983,32:99-102. |
| [15] | Lamperti A.;Ossi PM. .Systematic study of amorphous hydrogenated and fluorinated carbon films[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2003(1/4):113-120. |
| [16] | Butter R S;Waterman D R et al.[J].THIN SOLID FILMS,1997,311:107-113. |
| [17] | Jeremy A. Theil .Fluornated amorphous carbon films for low permittivity interlevel dielectrics[J].Journal of Vacuum Science & Technology, B. Microelectronics and Nanometer Structures: Processing, Measurement and Phenomena,1999(6):2397-2410. |
| [18] | Wei Zhang;Koichiro Wazumi;Akihiro Tanaka;Yoshinori Koga .Structural, mechanical and tribological properties of diamond-like carbon films prepared under different substrate bias voltage[J].Diamond and Related Materials,2002(11):1837-1844. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%