以无机盐为原料,采用溶胶-凝胶法在Si衬底上制备了La1-xSrxMnOa (LSMO)薄膜.XRD和TEM测试表明LSMO薄膜呈现纳米多晶菱形钙钛矿结构,薄膜的(012)、(110)晶面间距分别为0.38nm、0.28nm.SEM分析表明LSMO薄膜表面平整、光滑致密.电学测试La1-xSrx MnO3/Si异质结的I-V特性曲线表明,随着Sr掺杂量的增加,同一偏压下的开启电压变小,当电压大于10V时,La1-xSrxMnO3/Si异质结的电流迅速增大,呈现传统的p-n结特征.
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