介绍了一种制备周期可调谐金属光栅的新技术。首先采用紫外光刻技术将光栅结构制备至硅衬底,并在其上蒸镀一层薄的银以增强衍射效率,然后采取金属举离工艺,最后转移光栅结构至PDMS（聚二甲基硅氧烷）基底。利用PDMS高弹性的特点,通过控制PDMS的纵、横向机械拉伸程度,对金属光栅周期进行连续调谐,获得预定的目标周期。实验结果表明,金属光栅调谐范围超过其初始周期的30%。
A new fabrication approach for period-tunable metal grating is introduced.The grating pattern on a silicon substrate was formed by ultraviolet lithography firstly,a thin layer of Ag was evaporated on the grating to achieve an increased diffraction efficiency and then a lift-off process was employed,finally the grating was transferred onto a PDMS（Polydimethylsiloxane） substrate.Due to the high elastic property of the PDMS,the period of grating could be continuously varied by mechanically stretching the PDMS parallel with or perpendicular to grating lines.The experimental results show that the elongation of the grating can exceed 30% of the initial length.
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