采用热丝化学气相沉积(HFCVD)技术在石英玻璃上成功制备出高质量金刚石膜.采用表面三维轮廓仪和傅立叶红外光谱仪测试了不同工艺条件下金刚石薄膜的表面粗糙度和红外透射率,并分析了测试结果.结果表明所制备的金刚石膜表面平整,红外透射性能良好.
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